Vacuum-Compatible Platform
In-chamber ultrasonic spray deposition that doesn't disturb your vacuum — purely acoustic atomization with no air or carrier gas, operating down to roughly millitorr pressures.
MicroSpray nozzles atomize acoustically: high-frequency piezoelectric energy generates a capillary wavelet at the nozzle tip that breaks liquid into uniform fine droplets — no air, no carrier gas, no pressure differential. That makes them uniquely suited to vacuum work. The nozzle mounts through the chamber wall on a KF or CF flange and sprays directly inside the chamber without disturbing process vacuum, at operating pressures down to roughly the millitorr range. A proprietary flow-restriction device, designed specifically for vacuum conditions, keeps liquid delivery controlled under low pressure, and integrated temperature management ports keep the nozzle within its working range in hot or cold environments. The result is a practical liquid-precursor delivery platform for PVD, MOCVD, spray pyrolysis, and other controlled-atmosphere thin-film processes.
No Air, No Carrier Gas
Atomization is driven entirely by acoustic energy at the nozzle tip, so spraying adds no gas load to the chamber. Process vacuum stays undisturbed — with typical operation down to roughly millitorr pressures, suitable for PVD and MOCVD processes.
Vacuum Flange Mounting
Systems come equipped with KF or CF flanges for mounting directly into chamber walls, plus an optional threaded front shroud. The nozzle body seals at the flange while the atomizing tip sprays inside the chamber.
Controlled Liquid Delivery
A proprietary flow-restriction device, designed specifically for vacuum conditions, controls liquid delivery under low pressure — so flow rate stays stable even when the chamber side of the nozzle sits at millitorr while the feed side is at atmosphere.
Built for Controlled-Atmosphere Processes
Spray Pyrolysis
Liquid precursor delivery onto heated substrates for oxide films, TCO layers, and nanoparticle synthesis in controlled atmospheres.
PVD & MOCVD
Precursor introduction at millitorr operating pressures without adding gas load or disturbing chamber vacuum.
Extreme-Temperature Environments
Cooling/heating ports support environments above ~150°C or below −20°C, with thermocouple ports for monitoring internal nozzle temperature.
Where It's Used
Specifications
| Atomization | Purely acoustic — no air or carrier gas |
| Operating pressure | Vacuum service down to roughly the millitorr range |
| Chamber mounting | KF or CF flange, plus optional threaded front shroud |
| Liquid delivery | Proprietary flow-restriction device for low-pressure flow control |
| Temperature management | Cooling/heating ports for environments above ~150°C or below −20°C |
| Temperature monitoring | Thermocouple ports for internal nozzle temperature |
| Wetted materials | Titanium, stainless steel, PTFE |
Flange type, shroud, and temperature-management configuration are matched to your chamber and process — confirm details with our engineers.
Recommended Nozzles
ThermalSpray™ High-Temperature Ultrasonic Nozzle
Thermal isolation design built for spray pyrolysis and heated-chamber deposition up to 300°C
View details →Zero Air Nozzle
The core air-free ultrasonic nozzle — precise thin-film delivery with virtually zero flow rate
View details →Discuss Your Vacuum Process
Let's discuss whether the Vacuum-Compatible Platform fits your process.